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国際会議

2020.08.08

高増潔が関係した国際会議での発表論文です．（2020年4月）
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  1. Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Measuring Optical Properties of Advanced Nano/Micro-Periodic Structures Fabricated by Multi-Exposure Interference Lithography, International Conference on Leading Edge Manufacturing/Materials and Processing, 2021, 83624 V001T07A007
  2. Shusei Masuda, Tomohiko Takamura, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: High presicion measurement of elalon optical length using optical comb pulsed interference, Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2020, 2020, 323-324

  3. Makoto Yokei, Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical Trapping of Airborne Droplet for Laser Fabrication of 3-Dimensional Structure based on Optical Potential using Radially Polarized Beam, Proceedings of SPIE – The International Society for Optical Engineering, 2019, 11142
  4. M. Yokei, M. Hayashi, M. Michihata, K. Takamasu, S. Takahashi: Experimental investigation on laser additive processing principle for nanostructures based on optical trapping potential, Proc. of ASPEN2019, Matsue, Japan, 2019, A05
  5. S. Masui, M. Michihata, K. Takamasu, S. Takahashi: Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror, Proc. of ASPEN2019, Matsue, Japan, 2019, A14
  6. T. Kume, H. Yasuda, T. Mibe, M. Michihata, K. Takamasu: Pulse interval calibration of an optical frequency comb compressed by an etalon, Proc. of ASPEN2019, Matsue, Japan, 2019, C18
  7. S. Masuda, T. Takamura, S. Takahashi, H. Matsumoto, K. Takamasu: High precision measurement of etalon absolute length using optical comb pulsed interference, Proc. of ASPEN2019, Matsue, Japan, 2019, C19
  8. H. Nakajima, S. Masuda, A. Winarno, T. Takamura, H. Matsumoto, S. Takahashi, K. Takamasu: Evaluation of characteristics of ball lens and uniaxial stability in laser tracker, Proc. of ASPEN2019, Matsue, Japan, 2019, C31
  9. M. Chen, S. Xie, J. Li, Q. Liu, G. Zhou, C. Lin, H. Yu, J. Zhou, H. Wu, H. Matsumoto, S. Takahashi, K. Takamasu: Spectroscopic interferometer with a large length range by rotating diffraction grating, Proc. of ASPEN2019, Matsue, Japan, 2019, P68
  10. Tatsuya Kume, Hiromasa Yasuda, Tsutomu Mibe, Masaki Michihata, Kiyoshi Takamasu: Pulse Interval of an Optical Frequency Comb Compressed by an Etalon, Proc. of ISMTII2019, Niigata, Japan, 2019, A10
  11. Shiwei Ye, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical depth measurement of the diffraction-limited microgrooves with a noise-immune dual-wavelength interferometer, Proc. of ISMTII2019, Niigata, Japan, 2019, A21
  12. Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Coherent optical microscopy for micro-structured surface inspection beyond diffraction limit, Proc. of ISMTII2019, Niigata, Japan, 2019, A22
  13. Bohuai Chu, Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Sensing Near-Field Light Distribution for Microsphere Measurement Based on Whispering Gallery Mode, Proc. of ISMTII2019, Niigata, Japan, 2019, A24
  14. Masaki Michihata, Zhao Zheng, Kiyoshi Takamasu, Satoru Takahashi: In-Process Measurement Technique of Micro-Fiber Diameter with Interfered Scattering Pattern of Two Beam Irradiation, Proc. of ISMTII2019, Niigata, Japan, 2019, D02
  15. Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi: System Development for Microsphere Measurement Based on Whispering Gallery Mode Resonance, Proc. of ISMQC2019, Belgrade, Serbia, 2019
  16. Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: A novel optical super-resolution microscopy for coherent imaging system for micro-structured surface inspection, Proc. of euspen2019, Bilbao, Spain, 2019, 268-269
  17. Shusei Masuda, Tomohiko Takamura, Winarno Agustinus, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Development of the trilateration optical comb tracking system adopting ball lenses as references and targets, Proc. of euspen2019, Bilbao, Spain, 2019, 278-279
  18. Shuzo Masui, Masaki, Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fabrication of nano-and micro-structured surface using spatial beat of evanescent wave interference lithography, Proc. of euspen2019, Bilbao, Spain, 2019, 100-101
  19. Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Kota Hashimoto, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo: Absolute distance measurement of optical path length of non-contact three-dimensional nanoprofiler based on normal vector tracing method by tandem white-light interferometer, Proc. of SPIE Vol. 11056, 2019, 110560D-1-6
  20. Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Stefan Decoster, Frederic Lazzarino, Gian Lorusso: Linewidth and Roughness Measurement of SAOP by Using FIB and Planer-TEM as Reference Metrology, SPIE Advanced Lithography 2019, San Jose, USA, 2019, 109590Q 1-8

  21. Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Quantitative depth evaluation method of diffraction limited microgrooves based on near-field optical response, the 4th SJTU Future Information Technology International Forum for Young Scholars (SIFYS), 2018
  22. Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source, XXII World Congress of the International Measurement Confederation (IMEKO 2018), Belfast, UK, 2018, 142010 1-4
  23. D. Kong, M. Michihata, K. Takamasu, S. Takahashi: In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle, XXII World Congress of the International Measurement Confederation (IMEKO 2018), Belfast, UK, 2018, 142024 1-4
  24. Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Basic Study on Laser Additive Processing for Nanostructures Based on Optical Trapping Potential – Property Investigation of Generated Bessel Beam -, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, B-6-1
  25. Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Scattered Field Analysis for Diameter Measurement of Tapered Optical Fiber under Counter-propagating-beam Illumination, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-9
  26. Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Analysing tapered fiber-microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-10
  27. Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Investigation of super-resolution microscopy by use of a nano-patterned substrate, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-11
  28. Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo: Absolute measurement of optical path length of the three-dimensional nanoprofiler based on the normal vector tracing method by tandem white light interferometer, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-12
  29. Agustinus Winarno, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: In-situ Measurement of the Refractive Index and Geometrical Length for Determining the Location of Optical Part Using a Tandem Low-Coherence Interferometry, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-16
  30. Shusei Masuda, Tomohiko Takamura, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Development of a laser tracker using absolute length measurement technique by an optical comb pulsed interferometer, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-17
  31. Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu: Self-calibration method of nanometer profile measurement on large aspheric optical surface, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-18
  32. Hirokazu Matsumoto, Kiyoshi Takamasu: Non-Contact High Speed Measurements of the Processed-Product Shape Using New Optical Comb Interferometer, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-3-1
  33. Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Basic Study on Cell-in-Microfactory System with Localized Light Control – Analysis on handling performance of microparticles based on near-surface light wave -, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-3-2
  34. Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi: Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, F-2-7
  35. Masaki Michihata, Yumeki Kobayashi, Zheng Zhao, Bouhai Chu, Kiyoshi Takamasu, Satoru Takahashi: Ultra high precision diameter measurement of a microsphere based on whispering gallery mode resonances, The 1st JSPE affiliate workshop -Metrology and measurement, 12 November 2018, Kamakura, Japan, 2018
  36. Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota: Line Width Roughness of Advanced Semiconductor Features by Using FIB and Planar-TEM as Reference Metrology, SPIE Advanced Lithography, San Jose, USA, 2018, 10585-13

  37. Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position, CLEO2017, San Jose, USA, 2017
  38. Masaki Michihata, Bohuai Chu, Zhao Zheng, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi: Accuracy Improvement in Diameter Measurement of Microsphere Based on Whispering Gallery Mode, 59th Ilmenau Scientific Colloquium, Ilmenau, Germany, 2017
  39. K. Hayashi, B. Chu, Z. Zhao, M. Michihata, K. Takamasu, S. Takahashi: Evaluation Strategy of Spheroidal Distortion for Micro-Sphere Based on Whispering Gallery Mode Resonance, 59th Ilmenau Scientific Colloquium, Ilmenau, Germany, 2017
  40. Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Non-contact method of an absolute length measurement between two ball-lenses using a tandem low-coherence interferometer, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 109
  41. Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Coordinate measuring machine verification using an optical comb probe with ball-lens targets, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 150
  42. Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: In-process measurement on the thickness of photosensitive resin in evanescent wave-based nano-stereolithography, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 17
  43. Shiwei Ye, Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Experimental verification of a novel in-process depth measurements of diffraction limited micro-groove based on near-field optical response, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 46
  44. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Numerical investigation on refractive index compensation performance of three-color method, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 51
  45. Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Development of nanoparticle detection method based on a new principle combining volatile liquid and optical observation method: Study of highly sensitive optical detection system, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No.243
  46. Shuzo Masui, Yuki Suzuki, Yuki Matsumoto, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Multi-beam interference lithography based on evanescent wave for functional nano-complex surface, ASPE2017, 32nd American society of precision engineering, Annual meeting, North Carolina, USA, 2017, 113-116
  47. Xiang Guo, Satoru Takahashi, Yohan Kondo, Youichi Bitou, Kiyoshi Takamasu: Nanometer Profile Measurement on Large Aspheric Optical Surface, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-05
  48. Agustinus Winarno, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: The Development of an Absolute Internal Distance Measurement Between Two Ball Lenses Within Sub-Micro Accuracy, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-06
  49. Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Accuracy Evaluation of Optical Comb Probe for Coordinate Measuring Machines Verification, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-07
  50. Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Monitor Resin’s Curing Degree for In-process Measurement in Micro-stereolithography, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-08
  51. Jumpei Miyachi, Kiyoshi Takamasu, Satoru Takahashi: Precision Profile Measurement for Small Aspheric Optical Surface by an Multi-beam Angle Sensor, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-15
  52. Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Theoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MNF-O-09
  53. Yuki Matsumoto, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Double Imaging Micro-Stereolithography for One-Shot Curing of Surface Micro-Structure Unit, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MNF-O-10
  54. Shiwei Ye, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Linnike microscopic interferometry for depth measurement of diffraction limited micro-groove structure on the semiconductor surface, ISOT2017, 18th International Symposium on Optomechatronic Technologies, Tainan, Taiwan, 2017, BK-02
  55. Bohuai Chu, Kohei Hayashi, Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: High-precision measurement of dielectric microsphere diameter using whispering gallery mode resonance, LEM21, The 9th International Conference on Leading Edge Manufacturing in 21st Century, Hiroshima, Japan, 2017, E29
  56. Kazuki Tachibana, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Characteristic analysis of phase contrast microscopy in liquid probe type surface inspection method, LEM21, The 9th International Conference on Leading Edge Manufacturing in 21st Century, Hiroshima, Japan, 2017, E39
  57. Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo: Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer, ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, China, 2017
  58. Kiyoshi Takamasu: (Keynote) High-Accuracy Absolute Length Measurement Using Optical-Comb Pulsed Interferometer and Its Application for Verification of Coordinate Measuring Machines, ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, China, 2017, 1-4
  59. Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota: 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology, SPIE Advanced Lithography, San Jose, USA, 2017, 10145-67

  60. Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography, 18th CIRP Conference on Electro Physical and Chemical Machining, Tokyo, Japan, Procedia CIRP 42, 2016, 77-80
  61. Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb, euspen2016, 16th International Conference & Exhibition, Nottingham, UK, 2016, P1.25
  62. Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu: Development of 3D form measurement of semiconductor structure – Measurement of FinFET profile using TEM and CD-SEM images, euspen2016, 16th International Conference & Exhibition, Nottingham, UK, 2016, P1.52
  63. Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects, CLEO2016, Conference on Lasers and Electro-Optics, San Jose, USA, 2016, ATu3J.4
  64. Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Development of non-destructive optical depth measurement of sub-diffraction limit fine holes, nanoMan2016, 5th International Conference on Nanomanufacturing, Macau, China, 2016, 1-4
  65. Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance, LANE2016, 9th International Conference on Photonic Technologies, Physics Procedia 83, 2016, 964-970
  66. Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position, ASPE2016, 31st ASPE Annual Meeting, Portland, USA, 2016, 136-139
  67. Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface, ASPE2016, 31st ASPE Annual Meeting, Portland, USA, 2016, 407-410
  68. Xicheng Wang, Muzheng Xiao, Chao Wang, Xin Jin, Zhijing Zhang, Kiyoshi Takamasu: Distance measurement for rotation center to measurement table using triangulation method, Chinese Society for Optical Engineering Conferences, Proc. of SPIE 10255, 2016, 102553W1-10
  69. Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, B6-5
  70. Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Improved back-focal-plane interferometry for monitoring nanoparticle position, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C2-3
  71. Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C2-4
  72. Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi: Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C5-3
  73. Tatsuya Kume, Tsutomu Mibe, Shoichiro Nishimura, Mikio Sakurai, Yutaro Satoh, Wiroj Sudatham, Kiyoshi Takamasu, Hiromasa Yasuda: Precise alignment monitor by using optical frequency comb for the muon g-2/EDM experiment at J-PARC, IWAA2016, International Workshop on Accelerator Alignment, Grenoble, France, 2016
  74. Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, A317-8233
  75. Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: In-process measurement for micro-stereolithography using surface plasmon resonance, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, P47-8252
  76. Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A307-8210
  77. Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A312-8209
  78. Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi: Development of Advanced Measurement Method of 3D Semiconductor Structure – 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A315-8166
  79. Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Gian F. Lorusso, Naoto Horiguchi: 3D-Profile Measurement of Advanced Semiconductor Features by Reference Metrology, SPIE Advanced Lithography 2016, San Jose, USA, 2016, 9778 1-4
  80. Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, B103-8177

  81. Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target, 15th euspen International Conference (euspen2015)，Leuven, Belgium, 2015, 109-110
  82. Chen Meiyun, Genki Miyazaki, Satoru Takahashi, Kiyoshi Takamasu: Roundness measurement machine using multi-beam angle sensor – experimental verification of multi-beam angle sensor, 15th euspen International Conference (euspen2015), Leuven, Belgium, 2015, 125-126
  83. Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction, 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015), Harbin, China, 120 1-4
  84. Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: (Invited Paper) Non-contact precision profile measurement to rough surface objects with optical frequency combs, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1079 1-5
  85. Hiromasa Kume, Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Super-Resolution Optical Measurement Method Using Standing Wave Illumination with Three-Beam Interference, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1094 1-6
  86. Yumi Iwago, Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu: Self Calibration Method for Nanometer Profile Measurement on Large Aspheric Optical Surface, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1097 1-6
  87. Kazuki Tachibana, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
  88. Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: Improvement of lateral shape controlling with nitrogen purge for nano-stereolithography using evanescent light, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
  89. Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Atsuko Yamaguchi, Gian F. Lorusso, Naoto Horiguchi: Line Profile Measurement of Advanced-FinFET Features by Reference Metrology, Proc. of SPIE 9424, SPIE Advanced Lithography, San Jose, USA, 2015, 942406-1

  90. Satoru Takahashi, Hiroyuki Tahara, Kodai Miyakawa, Kiyoshi Takamasu: Fundamental study on the world’s thinnest layered micro-stereolithography using evanescent light, 2014 ASPE Spring Topical Meeting, Dimensional Accuracy and Surface Finish in Additive Manufacturing, Berkeley, USA, 2014
  91. Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi: Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator, ASPE/ASPEN Summer Topical Meeting 58, Hawaii, USA, 2014, 121-125
  92. Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Precision measurement technique for rough surface object using self-beat signals of optical frequency comb, 14th euspen International Conference (euspen 2014), Dubrovnik, Croatia, 2014, 181-184
  93. Hiroyuki Tahara, Kodai Miyakawa, Satoru Takahashi, Kiyoshi Takamasu, Toshimune Nagano: Theoretical Analysis of Spatial Process Resolution of Evanescent Light Exposure for Nano-stereolithography, 15th International Conference on Precision Engineering (ICPE2014), Kanazawa, Japan, 2014, 340-343
  94. Fumiya Kaji, Yuki Yamaguchi, Satoru Takahashi, Kiyoshi Takamasu: Analysis of TiO2 nanotool handling characteristics for microplastic structures based on laser trapping technique, 15th International Conference on Precision Engineering (ICPE2014), Kanazawa, Japan, 2014, 760-761
  95. Hirokazu Matsumoto, Kiyoshi Takamasu: Absolute Length-Measuring System by Automatic Interference-Fringe-Peak Detection with Optical-Comb Fiber Interferometer, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, A21
  96. Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, A25
  97. Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu: Measurement of Surface Roundness Using a Multi-Beam Angle Sensor, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, B02
  98. Hirokazu Matsumoto, Kiyoshi Takamasu: Distance Measurement Using Temporal-Coherence Interferometer with Optical Frequency Comb and Fiber Etalons, Frontiers in Optics, Tucson, USA, 2014,
  99. Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sidewall Roughness and Line Profile Measurement of Photoresist and FinFET Features by Cross-Section STEM Image for Reference Metrology, Proc. SPIE 9050, SPIE Advanced Lithography 2014, San Jose, USA, 2014, 90501K-1-7

  100. H. Yoshigoe, S. Takahashi, K. Takamasu: Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles, Proceedings of the 13th euspen International Conference (euspen2013), Berlin, Germany, 2013, 80-83
  101. Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Study on Lateral Resolution Improvement of Laser-Scanning Imaging for Nano Defects Inspection, 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany, 2013
  102. Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement on Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Autocollimator – Error Analysis and Measurement Experiments by Using Autocollimator with Wide Measuring Range -, 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany, 2013
  103. Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact precision distance measurement technique using two optical frequency combs, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  104. Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  105. Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu: Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  106. Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu: Line Width and Line Profile Measurement of Photoresist Using STEM Images, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  107. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length Traceability using Optical Frequency Comb, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  108. Ryota Kudo, Hiroki Yokozeki, Satoru Takahashi, Kiyoshi Takamasu: Coherent Imaging Algorithm of Super-Resolution Optical Inspection with Structured Light Shift, 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Matsushima, Japan, 2013, 177-181
  109. K. Miyakawa, R. Matsuzawa, S. Takahashi, K. Takamasu: Development of Hybrid Nano-Stereolithography System Using Evanescent Light and Propagating Light for High Throughput Fabrication, 28th Annual Meeting of the American Society for Precision Engineering (ASPE2013), St. Paul, Minnesota, USA, 2013
  110. Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices -Development of Three Dimensional Measuring Facility and Experiment-, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 137-140

  111. X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto: Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 259-262
  112. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 268-271
  113. Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method – Principle Introduction and Experimental Verification -, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, SS2-O-3 1-4
  114. H. Matsumoto, X. Wang, K. Takamasu: Absolute Measurement of Base Lines up to 400 m Using Temporal Coherence Heterodyne Interferometer of Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-12 1-4
  115. K. Takamasu, S. Takahashi, R. Furutani, M. Abbe: Round Robin Tests of Uncertainty Estimation for Coordinate Metrology by Software Error Propagation, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-15 1-4
  116. C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto: Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-19 1-5
  117. R. Kudo, S. Takahashi, K. Takamasu: Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by Using Standing Wave Illumination Shift, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-8 1-4
  118. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Comparison Experiment for Pulse Repetition Interval Based Length Measurement Linked to a Femtosecond Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-P-2 1-4
  119. Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM, Proc. SPIE Advanced Lithography 2012, San Jose, USA, 2012, 83240X 1-7

  120. Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices – Error Analysis and Experiments -, Proc. euspen2011, Como, Italy, 2011, 129-132
  121. P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji: A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine, Proc. euspen2011, Como, Italy, 2011, 150-153
  122. Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser, Proc. ISMTII2011, Daejeon, Korea, 2011, A4-3, 1-5
  123. Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination, Proc. ISMTII2011, Daejeon, Korea, 2011, A5-4, 1-6
  124. Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu: On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms, Proc. ISMTII2011, Daejeon, Korea, 2011, A7-2, 1-6
  125. Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High accuracy gauge block measurement using 2-GHz repetitions mode of a mode-locked fiber laser, Proc. ISMTII2011, Daejeon, Korea, 2011, B4-1, 1-4
  126. Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Development of high precision Coordinate Measuring Machine – Uncertainty analysis of multi-probe method, Proc. ISMTII2011, Daejeon, Korea, 2011, D2-5, 1-6
  127. Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu: Self-calibration for two-dimensional stage using least squares solution, Proc. ISMTII2011, Daejeon, Korea, 2011, E3-1, 1-6
  128. Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices, Proc. SPIE Optics + Photonics, San Diego, USA, 2011, 81260R 1-7
  129. Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine, Proc. SPIE Optics + Photonics, 2011, San Diego, USA, 81330T 1-7
  130. Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH3, 1-2
  131. Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu: Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH6, 1-2
  132. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Pulse repetition interval-based excess fraction method for length measurement directly linked to a femtosecond optical frequency comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThU6, 1-2
  133. D. Wei, N. Wu, K. Takamasu, H. Matsumoto: Remote internal diameter measurement of ring gauge based on a low-coherence tandem scheme, Proc. ASPEN2011, Hong Kong, China, 2011, P080 1-6
  134. Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM, Proc. SPIE AL 2011, San Jose, USA, 2011, 7971 797108 1-8
  135. Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Calibration for multiple motion errors of X-Y table on micro-coordinate measuring machine (M-CMM) by utilizing multi-probe scanning method, ISUPEN2011, International Symposium on Ultraprecision Engineering and Nanotechnology, Tokyo, Japan, 2011
  136. Satoru Takahashi, Takayoshi Oshima, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: Dynamic Control of Lateral Evanescent Light Distribution for Microstereolithography, Proc. of the 6th International Conference on Micro Manufacturing, Tokyo, Japan, 2011, 327-330
  137. Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring multiple motion errors of X-Y table in micro-coordinate measuring machine, The 3rd GMSI International Symposium, Tokyo, Japan, 2011, 135

  138. K. Takamasu, K. Kuwabara, S. Takahashi, T. Mizuno, H. Kawada: Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 116-119
  139. W. Agustinus, A. Hirai, S. Takahashi, K. Takamasu, H. Matsumoto: Improvement of Gauge Block Measurement Without Wringing Using Tandem Low-coherence Interferometer, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 237-240
  140. Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror – Enlarging Measuring Range of Autocollimator -, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-017-1-4
  141. Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-134-1-4
  142. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced Absolute Length Metrology Based on Pulse Trains’ Constructive Interference – Towards Measurements of Meter Order with an Accuracy of Nano Order -, Proc. 10th ISMQC, Osaka, Japan, 2010, C1-001-1-4
  143. Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser, Proc. 10th ISMQC, Osaka, Japan, 2010, D4-062-1-4
  144. Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb, Proc. 10th ISMQC, Osaka, Japan, 2010, E1-047-1-4
  145. Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM, Proc. 10th ISMQC, Osaka, Japan, 2010, E3-058-1-4
  146. Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth, Proc. 10th ISMQC, Osaka, Japan, 2010, E5-139-1-4
  147. Kiyoshi Takamasu: Uncertainty Estimation for Profile Measurement by Multi-Sensors Method, Proc. 10th ISMQC, Osaka, Japan, Plenary Lecture, 2010
  148. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains’ interference, Proc. EOS 2010, Paris, France, 2010, 3209
  149. Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu: Laser Direct Fabrication of Three-Dimensional Microstructures Using Photocatalyst Nanoparticles, Proc. of 4th CIRP International Conference of High Performance Cutting 2010, Gifu, Japan, 2010, 381-384
  150. Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light, Proc. ASPE2010, Atlanta, USA, 2010, 373-376
  151. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond optical frequency comb’s temporal coherence characteristic-based high-accuracy distance measurement, Proc. PGC 2010, Singapore, 2010, 1-6
  152. Kiyoshi Takamasu, Kazuki Kuwabara, Satoru Takahashi, Takeshi Mizuno, Hiroki Kawada: Sub-nanometer Calibration of CD-SEM Line Width by Using STEM, SPIE Advanced Lithography, SPIE 7638 – 55, 2010, 1-12
  153. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb’s temporal coherence character to a distant estimation, 4th Pacific International Conference on Applications of Lasers and Optics (PICALO), 2010
  154. Satoru Takahashi, Kiyoshi Takamasu: Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy, 4th TU-SNU-UT Joint Symposium, 2010, 12
  155. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Temporal coherence of a femtosecond optical frequency comb and applied quantity metrology applications, 4th TU-SNU-UT Joint Symposium, 2010, 52

  156. S. Takahashi, R. Kudo, S. Okada, S. Usuki, K. Takamasu: Experimental verification of super-resolution microscopy using standing evanescent light with image retrieval, euspen 2009, 2009, 171-174
  157. Kiyoshi Takamasu, Satoru Takahashi, Wang Tao, Ryoshu Furutani, Makoto Abbe: Uncertainty evaluation for coordinate metrology by intelligent measurement, ISMTII2009, 2009, 1 006-010
  158. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Study on the Temporal Coherence Function of a Femtosecond Optical Frequency Comb, SPIE Europe Optical Metrology 2009, SPIE 7389, 2009, 73891R 1-8
  159. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond Optical Frequency Comb for Volume Temperature Change Measurement, 8th Pacific Rim Conference on Lasers and Electro-Optics, 2009
  160. R. Kudo, S. Usuki, S. Takahashi, K. Takamasu: Fundamental Verification for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination Shift, IMEKO 2009, 2009, 106-111
  161. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Remote Measurement Using a Femtosecond-Optical-Frequency-Comb-Based Interferometer, Tech. Digest of the Eighth Japan-Finland Joint Symposium on Optics in Engineering, 2009, 31-32
  162. Winarno Agustinus, Akiko Hirai, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Novel Measurement Technique of Gauge Block Without Wringing Using a Tandem Low-coherence Interferometer, ASPEN2009, 2009, 1A2-5-1807
  163. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced optical metrology of geometrical quantity based on pulse trains’ destructive interference, ASPEN2009, 2009, 1D-13-1890p
  164. Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu: In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles, ASPEN2009, 2009, 2C-6-2009-p
  165. Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Algorithm for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination, ASPEN2009, 2009, 2D-12-2273-p
  166. Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New optical distance measurement without prism using an optical frequency comb laser, ASPEN2009, 2009, 2P10-3p
  167. Shin Usuki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Resolving Power Improvement for Optical Nano-Defect Measurement by using Sub-Pixel Sampling based on Structured Illumination Shift Method, ASPEN2009, 2009, 2P10-8p
  168. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb’s temporal coherence characteristic to evaluation of experimental environment, Optics Frontier 2010 Laser Technology Forum and Outstanding Achievements Release Conference of Chinese Optics 2009, LTFO-2010-2017

  169. S. Takahashi, T. Nagao, S. Minamiguchi, S. Usuki, K. Takamasu: Development of residual layer thickness measurement system for nano-imprint lithography based on near-field optics, euspen 2008, 2008, 295-299
  170. F.Iida, T. Akagawa, T. Hashimoto, Y. Jimbo, K. Takamasu, Y. Kawaguchi, K. Kotani: Evaluation of the interactive computer graphics that reflects cardiac vagal activity estimated in real-time, ASIAGRAPH2008 in Tokyo Proceedings, 2008, 220-223

  171. X. Chen, K. Kotani, K. Takamasu: Study on Algorithm of Reconstructing Topography Based on Topography Difference, euspen 2007 (Germany), 2007, 365-368
  172. G. Olea, S. Rathmann, J. Hesselbach, K. Takamasu: Developments for a High Precision Positioning Systems Family with Parallel Structure and Short Planar Motion, euspen 2007 (Germany), 2007, 485-488
  173. S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu: Development of laser-assisted microfabrication system for three-dimensional metal structures by photocatalysis, euspen 2007 (Germany), 2007, 529-532
  174. K. Takamasu, S. Takahashi, M. Abbe, R. Furutani: Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement, ISMTII2007 (Japan), 2007, 1-4
  175. S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu: Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light, ISMTII2007 (Japan), 2007, 45-48
  176. Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu: An Optical and Confocal Microscopic System for Nano-stereolithography Using Evanescent Light, ISMTII2007 (Japan), 2007, 79-82
  177. Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu: Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System, ISMTII2007 (Japan), 2007, 231-234
  178. S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift, ISMTII2007 (Japan), 2007, 387-390
  179. X. Chen, K. Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, ISMTII2007 (Japan), 2007, 437-440
  180. M. Nara, M. Abbe, K. Takamasu: Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data, ISMTII2007 (Japan), 2007, 815-818
  181. M. Abbe, M. Nara, K. Takamasu: Uncertainty Evaluation of CMM by Modeling with Spatial Constraint, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 121-125
  182. S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu: Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 167-172
  183. Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi Kotani, Satoru Takahashi: Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 178-183

  184. Gheorghe Olea, Tony Postiau, Benoit Raucent, Kiyoshi Takamasu: A New 4DOF Desktop Parallel Manipulation System (D-PMS) – Kinematic Analysis and Performance Evaluation, 7th National Congress on Theoretical and Applied Mechanics, Mons, Belgium, 2006
  185. S. Liu, S. Nagasawa, S. Takahashi, K. Takamasu: Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface, euspen 2006, Baden, Austria, 2006, 462-465
  186. Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu: A Super-Resolution Microscopy with Standing Evanescent Light and Image Reconstruction Method, IMEKO XVIII World Congress, Brazil Rio de Janeiro, 2006
  187. Masaki Okuno, Tasuku Aso, Satoru Takahashi, Kiyoshi Takamasu: A Novel Microfabrication Technique for Three-Dimensional Metal Structures by Photocatalysis, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006
  188. Yusuke Kajihara, Toru Takeuchi, Satoru Takahashi, Kiyoshi Takamasu: Development of a nano-stereolithography system using evanescent light for submicron fabrication, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006
  189. S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift, Proc. of SPIE Vol. 6375, Boston USA, 2006, 637508
  190. Gheorghe Olea, Kiyoshi Takamasu, Benoit Raucent: Precision Multi-Degrees-Of-Freedom Positioning Systems – Modular Design for Assembly Applications -, International Precision Assembly Seminar 2006 (IPAS 2006), (Bad Hofgastein, Austria, 19-22 February 2006), 2006, 251-262

  191. Masao Sugi, Makoto Nikaido, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Motion Control of Self-Moving Trays for Human Supporting Production Cell “Attentive Workbench”, Proc. of the 2005 IEEE International Conference on Robotics and Automation (ICRA 2005) (Barcelona, Spain), 2005, 4091-4096
  192. S. Usuki, T. Nakano, S. Takahashi, K. Takamasu: Computer Simulation of Nano-Void Inspection in Low-k Dielectric Materials Using Near-Field Optics, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 85-88
  193. R. Furutani, K. Shimojima, K. Takamasu: Self-Calibration of CMM with Redundant Degree of Freedom, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 173-176
  194. G. Olea, O. Sato, H. Kiyosawa, S. Takahashi, K. Takamasu: Experimental Method and Device for Spherical Joints Accuracy Evaluation, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 475-478
  195. Makoto Nikaido, Masao Sugi, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Akio Yamamoto, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Arrangement Planning for Multiple Self-Moving Trays in Human Supporting Production Cell “Attentive Workbench”, Proc. of the 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2005) (Edmonton, Canada), 2005, 3880-3885
  196. K Takamasu, O Sato, K Shimojima, S Takahashi, R Furutani: Estimation of uncertainty of measurements of 3D mechanisms after kinematic calibration, ISMTII2005 (Huddersfield, UK), Sep 6-8, 2005
  197. K. Kotani, M. Tachibana, K. Takamasu: Investigation of the influence of swallowing, coughing, and vocalization on heart rate variability with respiratory-phase domain analysis, Proc. of the IFMBE/IMIA 5th International Workshop on Biosignal Interpretation（Tokyo, Japan), 2005, 17-20
  198. Satoru Takahashi, Yuichi Inazuki, Yusuke Kajihara, Kiyoshi Takamasu: Photofabrication of Periodic Submicron Structures Using Standing Evanescent Light for Nano-Stereolithography, 20th Annual ASPE Meeting (Oct 9-14, 2005, Norfolk, Virginia, USA), 2005, 1729-1732
  199. S Liu, S Nagasawa, S Takahashi, K Takamasu: Profile Measurement of Resist Surface Using Multi-Ball-Cantilever AFM, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 604903-1-9
  200. S. Uski, H. Nishioka, S. Takahashi, K. Takamasu: Super-resolution optical inspection for semiconductor defects using standing wave shift, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 60490C-1-11

  201. X. Chen, K. Kotani, S. Takahashi, K. Takamasu: Development of Multiple Small Linear Planar Motor System, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 – June 2), 2004, 252-253
  202. S. Usuki, K. Enami, O. Sato, S. Takahashi, K. Takamasu: Improving the Accuracy of 3D Displacement Measurement using Ring-Shaped Laser Beam and High Resolution CCD, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 – June 2), 2004, 328-329
  203. O. Sato, K. Shimojima, G. Olea, R. Furutani, K. Takamasu: Full Parameter Calibration of Parallel Mechanism, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 – June 2), 2004, 396-397
  204. M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Takamasu, K. Kotani, H. Suzuki, Y. Sato: Attentive workbench: An intelligent production cell supporting human workers, 7th International Symposium on Distributed Autonomous Robotic Systems (DARS 04) (Toulouse, France 23-25 June), 2004, 441-450
  205. S. Takahashi, R. Nakajima, T. Miyoshi, Y. Takaya, T. Yoshioka, T. Hariyama, K. Kimura, T. Nakao, K. Takamasu: Nano-Defects Inspection of Semiconductor Wafer using Evanescent Wave, International Symposium on Photonics in Measurement, 23/24 June, Frankfurt, Germany, 2004, 307-316 (Plenary Presentation)
  206. M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Kotani, H. Suzuki, K. Takamasu, Y. Sato: Distributed control of multiple self-moving trays for an Intelligent cell production system, Proc. of The SICE Annual Conf. 2004 (Sapporo, Japan, 4-6 Aug), 2004, 2506-2511
  207. R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration for non-Cartesian CMM, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 317-326 (Plenary Presentation)
  208. K. Takamasu, S. Koga, S. Takahashi, M. Abbe, R. Furutani S. Ozono: Evaluation of Uncertainty by Form Deviations of Measured Workpieces in Specified Measuring Strategies, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 535-540
  209. Y. Kajihara, Y. Inazuki, S. Takahashi, K. Takamasu: Study of Nano-Stereolithography Using Evanescent Light, American Society for Precision Engineering (ASPE2004Annual Meeting, Florida, USA, Oct. 24 – 29), 2004, 149-152

  210. M. Fujiwara, K. Takamasu, S. Ozono: Evaluation of Properties of Nano-CMM by Thermal Drift and Tilt Angle, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1794-1797
  211. R. Furutani, K. Shimojima, K. Takamasu: Kinematical Calibration of Articulated CMM Using Multiple Simple Artifacts, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1798-1801
  212. K. Takamasu, K. Nosaka, M. Abbe, R. Furutani, S. Ozono: Estimation of Uncertainty from Unknown Systematic Errors in Coordinate Metrology, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1834-1837
  213. K. Shimojima, R. Furutani, K. Takamasu, K. Araki: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1844-1847
  214. K. Kotani, K. Takamasu, L. Safonov, Y. Yamamoto: Multifractal heart rate dynamics in human cardiovascular model, Proceedings of SPIE 5110 (June), 2003, 340-347
  215. H. Suzuki, F. Kimura, T. Arai, K. Takamasu, J. Ota, A. Yamamoto, K. Kotani, M. Sugi: An Overview of Attentive Workbench (AWB), Symposium on Real World Information Systems (Sept., Tokyo), 2003, 65-66
  216. I. Misumi, S. Gonda, Qiangxian Huang, Taeho Keem, T. Kurosawa, K. Takamasu: Development of nanometrological, dimensional standards in NMIJ, Proc. Korea-Japan Joint Symposium on Nanoengineering 2003 (Nov., Korea), 2003, 123-126
  217. T. Yoshioka, T. Miyoshi, Y. Takaya, S. Takahashi, K. Takamasu: Study on particle detection for patterned wafers by evanescent light illumination -evanescent light scattering simulation by means of FDTD method-, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 129-132
  218. I. Misumi, S. Gonda, T. Kurosawa, Y. Azuma, T. Fujimoto, I. Kojima, T. Sakurai, T. Ohmi, K. Takamasu: Uncertainty in Measurements of Micropatterned Thin Film Thickness Using Nanometrological AFM, Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, ASPE 2003 Winter Topical Meeting, Florida, USA，2003, 58-63

  219. O. Sato, H. Ishikawa, M. Hiraki, K. Takamasu: The Calibration of Parallel-CMM: Parallel-Coordinate Measuring Machine, euspen2002, Holland, 2002, 573-576
  220. I. Misumi, S. Gonda, T. Kurosawa, Y. Tanimura, N. Ochiai, J. Kitta, F. Kubota, M. Yamada, Y. Fujiwara, Y. Nakayama, K. Takamasu: Comparing Measurements of 1D-Grating Samples Using Optical Diffraction Technique, CD-SEM and nanometrological AFM, euspen2002, Holland, 2002, 517-520 
  221. R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration of Articulated CMM, euspen2002, Holland, 2002, 605-608
  222. M. Abbe, K. Takamasu: Modelling of Spatial Constraint in CMM Error for Uncertainty Estimation, euspen2002, Holland, 2002, 637-640
  223. Gheorghe Olea, Osamu Sato, Kiyoshi Takamasu: Parallel CMM – A New Development: Mechanical Design and Calibration Results, Proceedings of the 33rd ISR (International Symposium on Robotics), Sweden, 2002, 221-229
  224. Sinlapeecheewa and K. Takamasu: 3D Profile Measurement by Color Pattern Projection and System Calibration, IEEE ICIT’02, Bangkok, Thailand, 2002, 405-410
  225. K. Takamasu, I. Murui, O. Sato, G. Olea and R. Furutani: Calibration of Three Dimensional Mechanism – Novel Calibration Method for 3DOF Parallel Mechanism -, IEEE ICIT’02, Bangkok, Thailand, 2002, 394-398
  226. K. Shimojima, R. Furutani, K. Takamasu and S. Ozono: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, IEEE ICIT’02, Bangkok, Thailand, 2002, 411-415

  227. Gheorghe Olea, Kiyoshi Takamasu, Shigeo Ozono: Spatial Parallel Mechanism with 2DOF L-L Actuators, ISR2001, Korea, 2001, 1129-1134
  228. Kiyoshi Kotani, Kiyoshi Takamasu, Shigeo Ozono, Yoshiharu Yamamoto: A Model for Cardio-Respiratory Synchronization, 6th SIAM Conf. on Applications of Dynamical Systems, USA, 2001, 137-138
  229. K. Takamasu, M. Fujiwara, A. Yamaguchi, M. Hiraki and S. Ozono: Evaluation of Thermal Drift of Nano-CMM, Euspen2001, Torino, Italy, 2001, 306-309
  230. M. Fujiwara, A. Yamaguchi, K. Takamasu and S. Ozono: Evaluation of Stages of Nano-CMM, ICPE2001, Yokohama, Japan, 2001, 634-638
  231. O. Sato, M. Hiraki, K. Takamasu and S. Ozono: Calibration of 2-DOF Parallel Mechanism, ICPE2001, Yokohama, Japan, 2001, 734-738
  232. K. TAKAMASU, M. ABBE, R. FURUTANI and S. OZONO: Estimation of Uncertainty in Feature-Based Metrology, ISMTII2001, Egypt, 2001, 47-52

  233. Chih-Chea Kuo, K. Takamasu, A. Yamamoto, K. Sunouchi, S. Wada, K. Kase, H. Tashiro: Wavelength Scanning Interferometer for Surface Profile Measurement, Proc. 6th Int. Conf. on Automation Technology, 2000, 205-209
  234. R.Furutani, K.Matsuoka, K.Takamasu: Parameter Calibration for Self-Referenced Pattern Projection Method, Proc. Mechatronics 2000, 2000, 384-387
  235. K. Takamasu, M. Fujiwara, H. Naoi, S. Ozono: Friction Drive System for Nano-CMM, Proc. Mechatronics 2000, 2000, 565-568
  236. M. Abbe, K. Takamasu, S. Ozono: Reliability of Parametric Error on Calibration of CMM, IMEKO-XVI World Congress, 2000, 180-184
  237. K. Enami, M. Hiraki, K. Takamasu: Nano-Probe Using Optical Sensing, IMEKO-XVI World Congress, 2000, 345-348
  238. M.Hiraki, K. Takamasu, S. Ozono: Obstacle Detection Using Ring Beam System, IMEKO-XVI World Congress 2000, 589-593
  239. G. Olea, M. Hiraki, K. Takamasu, S. Ozono: Kinematics Analysis, Simulation and Design of a Parallel Mechanism with R-L Actuators, Proc. Parallel Kinematic Machines Int. Conf. 2000, 2000, 297-305

  240. Kiyoshi Takamasu, Masahiko Hiraki, Kazuhiro Enami, Shigeo Ozono: Development of Nano-CMM and Parallel-CMM – CMM in the 21th Century -, Int. Dimensional Metrology Workshop, 1999
  241. K. Takamasu, R. Furutani, S. Ozono: Statistical Evaluation of Minimum Zone Method in Coordinate Metrology, IMEKO-XV World Congress, 1999, 101-106
  242. M. Hiraki, N. Yoshikawa, K. Takamasu, S. Ozono: Development of 3 DOF Parallel-CMM, IMEKO-XV World Congress, 1999, 123-128
  243. K. Enami, C-C. Kuo, T. Nogami, M. Hiraki, K. Takamasu, S. Ozono: Development of nano-Probe System Using Optical Sensing, IMEKO-XV World Congress, 1999, 189-192
  244. Chih-Chea Kuo, A. Suzuki, M. Hiraki, R. Furutani, K. Takamasu, S. Ozono: Development of Touch Trigger Type Pneumatic Ball Probe, IMEKO-XV World Congress, 1999, 193-200

  245. K. Takamasu, Guo B-W., R. Furutani, S. Ozono: Basic Concept of Feature Based Metrology, Proc. ISMQC’98, Wien Austria, 1998, 637-642.
  246. Kiyoshi Takamasu, Kenji Nogami, Kazuhiro Enami, Shigeo Ozono: Development of Nano-Probe System for Nano-CMM, Proc. China-Japan Bilateral Symposium on Advanced Manufacturing Engineering, China, 1998, 124-129

  247. Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Development of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Proc. XIV IMEKO World Congress, Finland, 1997, 34-39
  248. Ryoshu Furutani, Hidemitsu Asano, Kiyoshi Takamasu, Shigeo Ozono: 3D Profile Measurement by Self-referenced Pattern Projection, Proc. XIV IMEKO World Congress, Finland, 1997, 190-195
  249. Chien-Ming Chen, Keiichi Wakida, Masahiko Hiraki, Kiyoshi Takamasu, Shigeo Ozono: A New Method for Measuring the Viscoelastic Twist Properties of Nematic Liquid Crystals by Evanescent-Wave Scattering, Proc. SPIE’s 42nd Annual Meeting, San Diego, 1997, 146-153
  250. Kiyoshi Takamasu, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Statistical Evaluation of Form Deviations in Coordinate Metrology, Proc. 9th IPES, Germany, 1997, 90-95
  251. Masahiko Hiraki, Nobuhiro Yoshikawa, Kiyoshi Takamasu, Shigeo Ozono: Parallel-CMM (Parallel-Coordinate Measuring Machine), Proc. 9th IPES, Germany, 1997, 363-366
  252. Kiyoshi Takamasu, Kuo Chih-Che, Akihiro Suzuki, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Development of Pneumatic Ball Probe for Measuring Small Hole, Proc. ICPE’97, Taiwan, 1997, 767-771
  253. Sonko Osawa, Kazuhiro Enami, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono: 3D-Profile Measurement by Self-referenced Pattern Projection Method – Application to the measurement of small objects -, Proc. ICPE’97, Taiwan, 1997, 817-821
  254. Ryoshu Furutani, Sonko Osawa, Kazuhiro Enami, Kiyoshi Takamasu, Shigeo Ozono: Quality of Projection Patterns in Self-referenced Pattern Projection Method, Proc. ICPE’97, Taiwan, 1997, 829-833

  255. Kiyoshi Takamasu, Satoshi Ozawa, Takayuki Asano, Akihiro Suzuki, Ryoshu Furutani: Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Japan-China Bilateral Symposium on Advanced Manufacturing Eng., 1996, 155-158
  256. Sonko Osawa, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono: Hidemitsu Asano, Profile Measurement by Combination Projection Method, Japan-China Bilateral Symposium on Advanced Manufacturing Eng., 1996, 207-211

  257. R. Furutani, H. Asano, K. Takamasu, S. Ozono: Profile Measurement by Comparing Multi-Gray Scale Projection with Reference Projection, Proc. 5th ISMQC, 1995, 368-372
  258. Kiyoshi Takamasu, Ichiro Fukuda, Ryoshu Furutani, Shigeo Ozono: Data Processing Method for Geometrical Forms with Form Deviations in Coordinate Metrology, Proc. 4th CIRP Seminar on Comp. Aided Tolerancing, 1995, 301-311

  259. Cheng Yuhui, Takanori Ikegami, Kiyoshi Takamasu, Shigeo Ozono: Sensing Strategy and Recognizing Attractor, Proc. IEEE Int. Conf. Multisensor Fusion and Integration for Intelligent Systems, 1994, 169-174
  260. Kiyoshi Takamasu, Kazuhiko Kawakami, Shigeo Ozono: Development of Optical Fiber Probes for NFSOM (Near-Field Scanning Optical Microscope), 4th Nanotechnology Symposium, 1994, 55-59
  261. Koichiro Okamura, Kiyoshi Takamasu, Shigeo Ozono, Ryoshu Furutani: Calibration of a Manipulator via the Product-of-Exponentials, 2nd Japan-France Cong. on Mechatronics, 1994, 400-403

  262. Kiyoshi Takamasu: Measurement System for Multiple Degree of Freedom Moving Robot, J. Robotics Mechatronics, 5(5), 1993, 453-456
  263. Kiyoshi Takamasu, Atushi Kobaru, Ryoshu Furutani, Shigeo Ozono: Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution, 7th Int. Prec. Eng. Seminar, 1993, 62-65
  264. Kiyoshi Takamasu, Tetuo Uekawa, Kazuhiko Kawakami, Shigeo Ozono, Ryoshu Furutani: Profile Measurements Using Multi-Gray Scale Pattern Projection, 2nd Int. Symp. on Measurement Tech Intell. Instruments. 1993, 93-109

  265. Kiyoshi Takamasu, Atushi Kobaru: Three Dimensional Position Measurement Using Optical Collimation, 3rd International Nanotechnology Symposium, 1992, 23-26
  266. Kiyoshi Takamasu: Measuring System for Multi-Freedom Robot, Proc. 1st Japanese-French Congr. Mechatronics, 1992, 125-130
  267. Kiyoshi Takamasu, Atushi Kobaru, Ryoshu Furutani, Shigeo Ozono: Three Dimensional Position Measurement Using Critical Angle Prism, Proc. ISMQC, 1992, 193-201

  268. Kiyoshi Takamasu, T. Kasahara: Three Dimensional Position Measurement of Spherical Target Using Optical Collimator, Proc. ISMQC, Aachen, 1989, 87-92

  269. Kiyoshi Takamasu, Yasuhiko Endoh: Profile Measurement of Reflector by Image Processing Using LED Display Unit, Proc. ISPMIE, Shanghai, 1987, 507-510
  270. J. Kato, T. Tanaka, S. Ozono, M. Shizawa, K. Takamasu: A Real-Time Profile Restoration Method from Fringe Patterns Using Digital Signal Processing, Proc. ISPMIE, Shanghai, 1987, 489-492
  271. S. Ozono, J. Kato, M. Hirata, K. Takamasu: Sensor for Guiding Mobile Robot, Proc. ISPMIE, Shanghai, 1987, 493-495

  272. Shigeo Ozono, Kiyoshi Takamasu, Junichi Kato, Masayuki Hirata: Application of High-Speed Distance Sensor to Guidance for Mobile Robot, Proc. IMEKO TC14, 1986, 51-58

  273. Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Development of the Three Dimensional Coordinate Measuring System with Ultra-Sonic Sensors, Proc. of 1st ISMQC, 1984, 300-305